ZyVector TM | STM LITHOGRAPHY CONTROL SYSTEM

Our system contains all of the necessary outputs and software to apply/read voltages to/from:

• 4 fine x/y channels
• 1 fine z channel
• 3 coarse XYZ channels
• 1 tip bias channel
• pre-amp gain control
• pre-amp bias control
• amplified current input

With these controls the user should be able — assuming adequate tip/sample/system quality — to perform STM scanning and HDL of complex patterns.

We expect the following functionality:

• Walk-in
  • Fast walk-in. This mode is where the coarse ramp rate is kept too high (50,000 nm/s) for effective tunneling detection. This is performed under optical feedback.
  • Automated walk-in. This mode is just like Fast walk-in, except it is performed with a slower tip ramp rate (on order of 1000-2000 nm/s) and a high (~-9V tip) voltage. When a current is detected, the coarse piezo freezes and the fine piezo retracts from the surface a specified amount. Feedback is otherwise “on” here.
  • Engage. This mode uses scanning conditions to bring the tip into contact with the sample. This is a very slow Automated walk-in followed by a “homing” process.

• Tip stepping
• We can move the tip sideways in x/y, using coarse piezos with the tip retracted from the surface a safe distance.

• Scanning
• Scanning of the surface with any size from 1-10,000 nm in x/y with rectangular scan aspect ratios available.
• Minimum scan pixel grid defined as 135V*calibration(nm/V)/216/division.
• division selectable between 1, 4, 14.
• (alternately: nominal scan range determined as 135V*calibration(nm/V)/division)
• Fast scan direction arbitrarily defined between 0 and 359.9 degrees relative to piezo tube axes.
• Many other scan controls available, as established in SCANZ.

• HDL
• Two modes possible
• AP mode
• FE mode
• Three input modes
• Bitmap input with each bitmap pixel correlating to a surface pixel of two dimers.
• Lattice pattern input with tip following a lattice registered path
• Litho pattern input independent of lattice if necessary (i.e., not necessarily a “Manhattan geometry” approach.)

• Advanced position controls (assuming adequate sample and tip condition)
• Piezo tube calibration based on lattice recognition, at least over the central portion of the scan range.
• Including determination of lattice angle relative to piezo tube axis.
• Linear creep correction in x/y
• Initial optimization of creep over timescales of 0.1s – 3600s
• Optimized over central portion of scan range, applied over entire piezo-tube range
• Lattice phase recognition

• Scripting capabilities
• We will provide scripts for test HDL patterns as well as additional scripts for basic functions and basic device patterns.

• Additional image and data archiving and analysis tools.

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For more information, please contact info@zyvexlabs.com.

© Copyright 2015. Zyvex Labs, LLC.