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The 51st International Conference on Electron, Ion and Photon Beam Technology
Nanofabrication Bizarre/Beautiful
Micrograph Contest
“A good Micrograph is worth more than the MegaByte it consumes.”
Entries Presented by Dr. John Randall
The rules include the following:
• Entries have to be of a single image taken with a microscope and could not be significantly altered.
• There is no restriction with respect to the subject matter.
• Electron and ion micrographs have to be black and white.
In 2007, 110 entries were submitted. There were many outstanding micrographs. The work represented in the submitted micrographs covered a wide range of fields including micro mechanical, photonic, and integrated circuit fabrication, chemical and dry etching, laser optics, carbon nanotube structures, carbon nanotube growth experiments, biological samples, material science experiments and, of course, e-beam, ion beam, x-ray, and photo lithography experiments.
The panel of judges who selected the award winners were:
• Lars Montelius
• Junichi Fujita
• Don Tennant
There were six awards:
• Grand Prize
• Best Electron Micrograph
• Best Ion Micrograph
• Best Photon Micrograph
• Best Video
• Most Bizarre Micrograph
There were six Honorable Mentions.
Judges exercised their prerogative to liberally interpret the award categories and change the micrograph titles.
GRAND PRIZE
Title: What’s Being Smoked?
Description:
A silicon wafer is etched in KOH, with the assistance of a laser. The beam locally heats the silicon,
increasing the etch rate greatly. The “fireworks” are small pieces of silicon breaking free and dissolving
in the KOH solution. Dark-field illumination brings out the edge features.
Magnification: (3″x4″ image): 2,000X
Instrument: Custom
Submitted by: Daniel Witte
Affiliation: Stanford University
Title: Gaudi’s Sagrada Familia – media: dirt
Description:
Polymeric structure, after “trying” to clean the sample.
Magnification: (3″x4″ image): 1.600 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Maggot Feast
Description:
ALIS He+ Image: White blood cell.
Magnification: (3″x4″ image): 20,000X
Instrument: ALIS 1
Submitted by: Nick Economou
Affiliation: Carl Zeiss SMT
Title: Obsidian
Description:
Bubbles in thick, stretched photoresist.
Magnification: (3″x4″ image): 8x
Instrument: Nikon SMZ 1500
Submitted by: Keith Morton
Affiliation: Princeton University
Title: Micro Geyser
Description:
Fluorescent beads trapped in a drying droplet on a structured silicon surface.
Magnification: (3″x4″ image): 10x
Instrument: Nikon TE 300
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Running Man
Description:
Nanojogger sprints along 200nm pitch gratings after a contaminated high temperature anneal.
Magnification: (3″x4″ image): 91kx
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Cosmic Flatulation
Description:
E-beam alignment at the edge of a wafer (optical micrograph).
Magnification: 500X
Instrument: Leica DMRM
Submitted by: Sergey Babin
Affiliation: Abeam Technologies, Inc.
Title: This is your brain on Jarlsberg
Description:
Self Assembled patterns (LISA) formed in resist during Nanoimprint transferred into silicon substrated by DRIE.
Magnification: (3″x4″ image): 10,500x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Failure to Ignite
Description:
Replication of Surface Structures with Polydimethylsiloxane.
Magnification: 5,000X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Where’s the Fruit?
Description:
GST patterns after sputtering and lift-off.
Magnification: (3″x4″ image): 50,000 x
Instrument: Hitachi S-4300
Submitted by: Sung Hoon Hong
Affiliation: Nano Materials & Devices Lab, Korea University
Title: Tripe Close Up
Description:
200nm pitch gratings in imprint resist curl up near a scribe mark.
Magnification: (3″x4″ image): 150,000x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Marching Low Brass
Description:
IPA film expanding on the top of Si wafer: formation of spectacular octopi-like dynamic group structures.
Magnification: (3″x4″ image):
Instrument: Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Caves (Stalagnieten)
Description:
Heated of Silicum.
Magnification: 4,000X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Donut
Description:
The picture shows a feature on a micro-molded part from a deep-etched silicon mold.
The replication is incomplete due to premature itrification of the thermoplastic polymer.
Magnification: 1,250X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Cell Division of an Embryo
Description:
The SEM photograph shows a detail of a quartz plate that was locally isotropically etched with hydrogen fluoride solution.
Magnification: 1,250X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Leaves
Description:
A metal film was structured by plasma etching.
Magnification: 100.000 x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Skyline of Hong Kong
Description:
Micro-masking during dry-etch process.
Magnification: 80.000x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: Wave
Description:
Bad adhesion of metallization.
Magnification: 40.000 x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands
Title: CNT+CdTe=PV
Description:
Single carbon nanotube coated via MBE with CdTe for photovoltaic device.
Magnification: scale bar
Instrument: LEO 1550
Submitted by: Jud Ready
Affiliation: Georgia Tech
Title: Nano Clown
Description:
A by-product of duplication of nano-rings by nanoimprint lithography.
Magnification: 279.9KX
Instrument: LEO 1550
Submitted by: Can Peng
Affiliation: Nanostructure Lab, Princeton University
Title: Dragonfly Among the Reeds
Description:
The nanodragonfly plays among the nanoreeds in the nanoswamp.
Magnification: 698
Instrument: Zeiss 1560
Submitted by: Nina Ruiz
Affiliation: IBM T.J. Watson Research Ctr
Title: Air-Bridge #1 Electrical Nano-Interconnects to Photonic Crystal Microcavity Arrays
Description:
Electrical contacts are made via nano-contacts to sub-micron pedestal mounted 2D
photonic crystal membrane microcavities in III-V quantum dot heterostuctures.
Air bridges are fabricated by single step e-beam lithography to achieve high
carrier injection efficiency to the microcavity and avoid non-radiative
recombination losses.
Magnification: 16.46KX
Instrument: Raith 150 + Leo SEM
Submitted by: Swapnajit Chakravarty
Affiliation: University of Michigan, Ann Arbor
Title: Nano-Electrical Bridges Interconnect Photonic Crystal Nanocavity Arrays
Description:
Electrical contacts are made via nano-contacts to sub-micron pedestal
mounted 2D photonic crystal membrane microcavities in III-V quantum dot
heterostuctures. Air bridges are fabricated by single step e-beam
lithography to achieve carrier injection into nanocavities surrounded
by etched air holes and avoid non-radiative losses.
Magnification: 25.74 KX
Instrument: Raith 150 + Leo
Submitted by: Swapnajit Chakravarty
Affiliation: University of Michigan, Ann Arbor
Title: Trojan Horse in the Micro-World
Description:
Nanoscale clusters appear to be a Trojan horse unexpectedly.
Magnification: 3880 X
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Emergency Train Stop
Description:
Copper film delaminated during cleaving of samples for cross sectional SEM.
Magnification: 4940 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Micro Limestone Caves
Description:
A nanoscale copper cluster deposition in trenches emulates the formation of stalactites in limestone caves.
Magnification: 32 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Copper Leaf Trees
Description:
Nanoscale copper particles stick to the side walls and transform to leaves.
Magnification: 20 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Christmas Trees and Oak Trees
Description:
Nanoscale copper particles stick to the side walls and appear like oak trees holding hands to protect the Christmas trees underneath.
Magnification: 15 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Desert Vision
Description:
When the cleaved surface of Si wafer was damaged, unexpected vision appeared.
Magnification: 2000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Dolphins Sun Bathing
Description:
After annealing in high temperature, copper nanoscale clusters agglomerate and transform into rows of nanoscale dolphins.
Magnification: 70 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Roller Coaster
Description:
Low-k dielectric material deformed under electron radiation making the trenches bend over.
Magnification: 4370 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Fireworks
Description:
After surviving the cold winter at liquid nitrogen temperature, the nanoscale clusters peel off and transform into fireworks to celebrate New Year.
Magnification: 10 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury
Title: Cadillac Mountain
Description:
You do not have to wait in the early morning at Acadia National Park for this spectacular scene— just look into your RIE chamber…
Magnification: (3″x4″ image): ~1.5x
Instrument: SONY W5 digital camera
Submitted by: Qiangfei Xia
Affiliation: Princeton University
Title: Rudolph the Nano-Sized Reindeer
Description:
Rudolph is leaping among the snowflakes to save Christmas for a whole new nano world.
Magnification: (3″x4″ image): 196,830X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University
Title: “Luray Caverns” by a New Paradigm
Description:
120 years per cubic inch for stalactite growth? It’s like doing EBL. Why not use NIL as shown here?
Magnification: (3″x4″ image): 100,000X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University
Title: “Luray Caverns” by a New Paradigm
Description:
When the Disney Company requested some design ideas for a new park in Princeton,
a group of Mr. Small (a.k.a., nanos) in town took advantage of their deep silicon
etcher and excimer laser…
Magnification: (3″x4″ image): 50,000X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University
Title: New Jersey, Imprinted!
Description:
At Princeton, even a failed imprint is made of New Jersey, in New Jersey and for New Jersey.
Magnification: (3″x4″ image): 1,100X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University
Title: Sharks Everywhere!
Description:
Silicon sharks circle around an HPR victim in a Flowable Oxide sea.
Magnification: (3″x4″ image): 60,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Nano Dwarf
Description:
Nano dwarf Oblio strolls the HSQ/Silicon surface, looking for his dog Arrow.
Magnification: (3″x4″ image): 150,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Alien
Description:
During a starry night at full moon, an Alien larva awakes right on top of my HSQ/HPR line pattern!
Magnification: (3″x4″ image): 25,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Black Hole
Description:
Silicon debris is circulating towards the microns-wide center of the maelstrom.
Magnification: (3″x4″ image): 5,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Cat Face
Description:
After developing an HSQ pattern, this wet cat gazes at me as if I should have used another developer.
Magnification: (3″x4″ image): 5,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Egyptian Eye
Description:
Egyptian mythology meets Nanotechnology through the Eye of Horus.
Magnification: (3″x4″ image): 280X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: EIPBN Conference 2007
Description:
Beyond the Rocky Mountains, nano-technologists from all over the world gather in Denver, Colorado.
Magnification: (3″x4″ image): 24,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Have an Ice Cream
Description:
Special offer: HSQ/HPR/Silicon flavored ice cream!
Magnification: (3″x4″ image): 600X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Let it Snow!
Description:
This happens in HSQ lithography when skipping the stop bath!
Magnification: (3″x4″ image): 10,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: MicroGRAPHiti
Description:
This would be a winner when SEM micrographs will be in color…
Magnification: (3″x4″ image): 400X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Let’s Build A Nanoworld
Description:
Giant Silicon building blocks on top of arrays of sub-10nm HSQ line patterns.
Magnification: (3″x4″ image): 16,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Waves
Description:
Seismic waves propagate outside a meteor crater in the Silicon surface.
Magnification: (3″x4″ image): 1,200X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands
Title: Dali’s Smallest Canvas – Micro Elephant’s Back
Description:
This image resulted from testing of a micro-mirror array based
stereo-lithography tool. The original artwork image was fed to
the mirror control software which translated the original colors
into an exposure time and the image was captured on a photoresist
thin film. The colors now seen in the image are the result of
different thin film interference colors due to the variations in
resist film thickness after film development.
Magnification: (3″x4″ image): 10X
Instrument: Olympus Vanox
Submitted by: Cliff Henderson
Affiliation: Georgia Tech
Title: Micro Van Gogh – A Very Small Starry Night
Description:
This image resulted from testing of a micro-mirror array based
stereo-lithography tool. The original artwork image was fed to
the mirror control software which translated the original colors
into an exposure time and the image was captured on a photoresist
thin film. The colors now seen in the image are the result of
different thin film interference colors due to the variations in
resist film thickness after film development.
Magnification: (3″x4″ image): 10X
Instrument: Olympus Vanox
Submitted by: Cliff Henderson
Affiliation: Georgia Tech
Title: Micro Radio Telescope Array
Description:
If SEM is scanning over this telescope array, it will perceive you and begin to scan you one after another.
Magnification: (3″x4″ image): 1500x
Instrument: HITACHI S-3000H
Submitted by: Harutaka Mekaru
Affiliation: AIST, Japan
Title: Kiss Under the Sea
Description:
A little mermaid and a dolphin kiss each other under the sea.
Magnification: (3″x4″ image): 503x
Instrument: FEI XL-30 ESEM Submitted by: Jaebum Joo
Affiliation: MIT
Title: Hazardous
Description:
Bubble in a tri-layer resist stack.
Magnification: (3″x4″ image): 200x
Instrument: Nikon, Optical
Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada
Title: On the Nano-Green
Description:
InP whisker.
Magnification: (3″x4″ image): 130kx
Instrument: Hitachi S-4700 Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada
Title: Nano-Trees
Description:
InP whisker.
Magnification: (3″x4″ image): 15kx
Instrument: Nikon, Optical
Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada
Title: Nano-Muffins
Description:
Over grows by electo-plating and nanoimprint lithography.
Magnification: (3″x4″ image): 30,000x
Instrument: Hitachi S-4300
Submitted by: Jong Woo Kim
Affiliation: Nano Materials & Devices Lab, Korea University.
Title: Gizah Mikado
Description:
A DUV resist was exposed with E-Beam at 50kV. In vacuum, the photo active
compound of the resist is volatile and characteristic inverted pyramids are
being formed.
Magnification: (3″x4″ image): 20kx
Instrument: Hitachi RS4000 SEM
Submitted by: Katja Keil
Affiliation: Fraunhofer CNT, Dresden, Germany
Title: Room With A View
Description:
There’s plenty of room at this castle sculpted from silicon during deep reactive ion etching.
Magnification: (3″x4″ image): 110,000x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Nano Kisses
Description:
Nanoimprinted Kisses arrayed on a platter.
Magnification: (3″x4″ image): 400,000x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Branched
Description:
Lone, bifurcated silicon nanopillar after deep silicon etch.
Magnification: (3″x4″ image): 60,000x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Bubbly
Description:
Water condenses on the inside of air pocket in PDMS after curing (white light with red filter).
Magnification: (3″x4″ image): 11x
Instrument: Nikon SMZ 1500
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: A Baseball Bat for the Nano Leagues
Description:
Tapered silicon pillar by Deep Reactive Ion Etching.
Magnification: (3″x4″ image): 10,800x
Instrument: Philips XL30 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: Pitcher Plants
Description:
Hollowed out silicon pillars after deep reactive ion etching.
Magnification: (3″x4″ image): 22,820x
Instrument: Philips XL30 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University
Title: I’m Watching You!
Description:
Creepy crawly vistor to the lab
Magnification: (3″x4″ image): 10x
Instrument: Nikon SMZ 1550
Submitted by: Keith Morton
Affiliation: Princeton University
Title: Waterfalls
Description:
Scenery of nitride waterfalls with bizarre silicon stones in MIT Nanostructure Laboratory.
Magnification: (3″x4″ image): 10,000x
Instrument: Zeiss Leo 982 SEM
Submitted by: Minseung Ahn
Affiliation: MIT
Title: Nano Giraffes
Description:
Ten micron tall giraffes are wandering in the silicon bush.
Magnification: (3″x4″ image): 3,000x
Instrument: Zeiss Leo 982 SEM
Submitted by: Minseung Ahn
Affiliation: MIT
Title: Nano Conductor
Description:
This video obtained by SEM shows the nano conductor structure growth
by FIB-CVD. This video is a x15 speed video. By using SEM observation,
we carried out the in-situ observation of 3-D structure growth by FIB-CVD.
The nano conductor is made of DLC and he has a taktstock of 100nm diameter
in his left hand. By FIB-CVD, 3-D structure is grown up like this video.
Magnification: (3″x4″ image): 17,000x
Instrument: SII NanoTechnology Inc. / SMI2050MS2
Submitted by: Reo Kometani and Shinji Matsui
Affiliation: University of Hyogo
Title: Brush
Description:
Bad adhesion of HSQ (Hydrogen silsesquioxane) structures after development.
Magnification: (3″x4″ image): 16,469x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Tree in the Morning
Description:
Iron whisker after EBID growth.
Magnification: (3″x4″ image): 26,823x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Imprinted Tulips
Description:
Imprint into PMMA.
Magnification: (3″x4″ image): 100x
Instrument: Leitz F5
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Zorro`s Nanotube Z
Description:
Carbon nanotubes along a scratch on a silicon oxide substrate.
Magnification: (3″x4″ image): 596x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Dog
Description:
Silicon particle on a silicon substrate.
Magnification: (3″x4″ image): 2,490x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Colorado Rockies
Description:
Side view of HSQ (Hydrogen Silsesquioxane) peaks.
Magnification: (3″x4″ image): 16,469x
Instrument: 292,768x
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Dancer
Description:
Side view of a silicon particle on a silicon substrate.
Magnification: (3″x4″ image): 65,169x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Fakir-Stone
Description:
Silicon particle on HSQ (Hydrogen Silsesquioxane) lines.
Magnification: (3″x4″ image): 36596x
Instrument: Ph. XL30
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Loose Ends
Description:
Resist mask for interdigitated electrodes, where the HMDS priming was forgotten.
Magnification: (3″x4″ image): 1,500x
Instrument: Hitachi S4800
Submitted by: Bengt Nilsson
Affiliation: Chalmers University of Technology, Nanofabrication Laboratory University of Tuebingen
Title: Nano Seagull
Description:
While scanning the electron beach on a day made hot by the thermal
emission source, this nano-seagull was observed staying cool in the
signal-to-noise fog.(organ ic residue on wafer after etch viewed in
cross-section)
Magnification: (3″x4″ image): 71,100x
Instrument: Hitachi S-3500N SEM
Submitted by: David J. Carter
Affiliation: The Charles Stark Draper Laboratory
Title: Nano Pterodactyl
Description:
Our SEM may not be the latest model, but it’s not that old…
(organic residue on wafer after etch viewed in cross-section)
Magnification: (3″x4″ image): 13,333x
Instrument: Hitachi S-3500N SEM
Submitted by: David J. Carter
Affiliation: The Charles Stark Draper Laboratory
Title: Blue Flowers
Description:
Dots imprinted in PMMA. Dark field optical image.
Magnification: (3″x4″ image): 50x
Instrument: Nikon, Optical Microscope ME600
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Seashore
Description:
Rubbish on Structures made in Gold on a polymer substrate.
Magnification: (3″x4″ image): 7.940 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Under the Sea
Description:
Air bubbles in PMMA.
Magnification: (3″x4″ image): 2.540 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Rhapsody in Blue
Description:
Matrix of Dots, imprinted in PMMA. Dark field optical image.
Magnification: (3″x4″ image): 100 x
Instrument: Nikon, Optical Microscope ME600
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Spring
Description:
PMMA structures formed during NanoImprint
Magnification: (3″x4″ image): 800 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Toothbrush
Description:
Aluminum pattern after a lift-off.
Magnification: (3″x4″ image): 3.430 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM – Barcelona
Title: Nano Sunflower
Description:
Electron-beam patterned HSQ needles form sunflower florets
Magnification: (3″x4″ image): 15,000 x
Instrument: Zeiss 982
Submitted by: Joel Yang
Affiliation: MIT
Title: The Titanic Cruising Over Troubled Waters
Description:
100 nm (W) x 1 micron (H) nanowaveguide in U configuration fabricated in HSQ, used as an etch mask on 1 micron thick SU8.
Nanowaveguide fabricated with 100 KV JEOL 9300 electron beam lithography tool. Etch process had some gas mixture problems.
Magnification: (3″x4″ image): 25,000 x
Instrument: FEI
Submitted by: L.E. Ocola
Affiliation: Argonne National Lab
Title: Emerging Frog
Description:
Resist at the edge of a silicon substrate.
Magnification: (3″x4″ image): 100 x
Instrument: Leitz F5
Submitted by: Michael Häffner
Affiliation: University of Tuebingen
Title: Next Generation Tie Fighter
Description:
Titanium grown on silicon.
Magnification: (3″x4″ image): 5,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory
Title: Battle Samurai Helmut (Kabuto)
Description:
Resist etched on silicon.
Magnification: (3″x4″ image): 100,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory
Title: Fish Exercising Their First Amendment Right to Peaceably Assemble
Description:
Silicon nodules.
Magnification: (3″x4″ image): 50,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory
Title: Spaghetti
Description:
High volume manufacturing of sub-µm spaghettis.
Magnification: (3″x4″ image): 5,540 x
Instrument: LEO, Supra35
Submitted by: Thomas Glinsner
Affiliation: EVGroup
Title: Long Stemmed Rose
Description:
A silicon nitride membrane was rolled up by high dose helium ion implantation.
Magnification: (3″x4″ image): 3,500 x
Instrument: Zeiss DSM982 Gemini SEM
Submitted by: William Arora
Affiliation: MIT
Title: Stealth Fighter
Description:
A photoresist coat only stuck inside the areas that were etched into this silicon nitride membrane.
Magnification: (3″x4″ image): 400 x
Instrument: Leica Ergolux microscope
Submitted by: William Arora
Affiliation: MIT
Title: Electrospun DNA Lightning
Description:
Electrospinning of fluorescent DNA produces nanofibers. This one decided not to form a straight fiber over trenches…
Magnification: (3″x4″ image):
Instrument: Olympus BX-51
Submitted by: Leon Bellan
Affiliation: Cornell University
Title: Cu deposition art!!!
Description:
PVD Cu blanket film defectivity.
Magnification: (3″x4″ image):
Instrument: Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: DIW drying film curriculum vitae: frame formation
Description:
Once the film is saturated with dissolved material, its contraction
freezes and the peripheral section swiftly detaches itself from the
internal section, forming a frame.
Magnification: (3″x4″ image):
Instrument: Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Real time SEM: Convective motion in molten Cu film
Description:
Once the film is saturated with dissolved material, its contraction freezes,
and the peripheral section swiftly detaches itself from the internal section,
forming a frame.
Magnification: (3″x4″ image):
Instrument: Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #1: Just a watermark
Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #2: Through space
Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #3: Observer
Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #4: Space Lion
Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #5: No title
Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: Watermark Series #6: IPA mark actually
Description:
IPA-Si watermarks (residue left over the Si wafer surface after evaporation of IPA droplets).
Magnification: (3″x4″ image):
Instrument: Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor
Title: There’s plenty of room at the bottom…TO PARTYYY!
Description:
Electron-beam exposed HSQ nano-figurines on Si.
Magnification: (3″x4″ image): 100,000X
Instrument: Zeiss 982
Submitted by: Joel Yang
Affiliation: MIT
Title: Diving Board for Jumping into Oblivion at the Edge of the Nano-Universe
Description:
Shard of Silicon Nitride (300nm thick) patterned with 300nm diameter holes hovers over a cleaved sample.
Magnification: (3″x4″ image): 10,000X
Instrument: Zeiss LEO SEM
Submitted by: Amil Patel
Affiliation: MIT
Title: Broke
Description:
ALIS He+ Image: Carbon Nanotube Image.
Magnification: (3″x4″ image): 50,000X
Instrument: ALIS 1
Submitted by: Nick Economou
Affiliation: Carl Zeiss SMT