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The 50th International Conference on
Electron, Ion and Photon Beam Technology

Nanofabrication Bizarre/Beautiful
Micrograph Contest

“A good Micrograph is worth more than the MegaByte it consumes.”

Results Submitted by Dr. John Randall

The rules included the following:

• Entries had to be of a single image taken with a microscope and could not be significantly altered.
• There was no restriction with respect to the subject matter.
• Electron and ion micrographs had to be black and white.

In 2006, 81 entries were submitted. There were many outstanding micrographs. The work represented in the submitted micrographs covered a wide range of fields including micro mechanical, photonic, and integrated circuit fabrication, chemical and dry etching,  laser optics, carbon nanotube structures,  carbon nanotube growth experiments,  biological samples, material science experiments and, of course, e-beam, ion beam, x-ray, and photo lithography experiments.

The panel of judges who selected the award winners were:
• Stella Pang
• Eric Winfree
• Shalom Wind
• Felice Frankel

There were Six Awards
• Best Electron Micrograph
• Best Ion Micrograph
• Most Screwed up Micrograph
• Best Photon (optical) Micrograph
• Best Scanning Probe Micrograph
• Grand Prize

There were nine Honorable Mentions.

Judges exercised their prerogative to liberally interpret the award categories
and change the micrograph titles.


Best Electron Micrograph

06bestelectron

Title: West Side Story

Description:
In the so-called Bosch process plasma etchingis done by SF6 plasma.


Magnification
: 20.000X
Instrument: Philips XL40FEG
Submitted by: Frans Holthuysen & Falco van Delft
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Best Ion Micrograph

06bestion

Title: Yoga Class

Description:
They do aerobic exercise everyday. Aerobic dancing is very good for hearth and possible to forget unpleasant things. Let’s do aerobics together and enjoy our lives.

Magnification (3″x4″ image):   36,000x
Instrument (Make and Model):  SII NanoTechnology Inc. / SMI2050MS2
Submitted by: Chiaki Minari & Shinji Matsui
Affiliation: University of Hyogo)


Most Screwed Up Micrograph

06mostsum

Title: Screwed Up

Description:
300nm diameter nanosculpted pillars pile-up from scribing damage at the cleaved edge of a Silicon wafer.

Magnification: ~15 000X
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: Princeton University


Best Optical Micrograph

06bestoptical

Title: Persian Fresco

Description:
Double layer hydrogen silsesquioxane film cracks after high temperature anneal.

Magnification (3″x4″ image):  100X
Instrument (Make and Model): Olympus MX50 optical microscope
Submitted by: Hao Lin Affiliation
Affifliation: Cornell University


Best Scanning Probe Micrograph

06bestspm

Title: Stephen Chou’s Flower Garden

Description:
Lithographically induced self assembly (LISA) pattern at the edge of an imprinted sample forms trees at peak color in the foliage season along a river bank.

Magnification: 125X
Instrument: Olympus MX40 (Nomarski objective)
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Grand Prize

06grandprize

Title: Micro Steps

Description:
Fracture is destructive; but it can also reveal the hidden beauty of the layered steps inside closed pores in La0.8Ca0.2CoO3.

Magnification (3″x4″ image): 40,000X
Instrument (Make and Model):   Hitachi S-4700 SEM
Submitted by: Siddhartha Pathak
Affiliation: Drexel University


Honorable Mentions

06honmen1

Title: MicroMite

Description:
Un-cured resist forms a tiny mite during the mold separation process of a failed nanoimprint lithography.


Magnification
:  5,080X
Instrument: LEO 1550  SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Honorable Mention

06honmen2

Title: Peace of World

Description: There are six continents in the world.
But penguins only live in Antarctica.
It’s very important to take each other’s hands all over the world like this photograph.


Magnification
(3″x4″ image):   36,000X
Instrument (Make and Model):  SII NanoTechnology Inc. / SMI2050MS2
Submitted by: Chiaki Minari & Shinji Matsui
Affiliation: University of Hyogo


Honorable Mention

06honmen3

Title: Tungsten Toke

Description:
1 micron Mylar film sputtered with tungsten and shrunk with heat


Magnification
(3″x4″ image): 800X
Instrument (Make and Model): LEO1525 SEM
Submitted by: Dhara Parikh
Affiliation: University of Houston


Honorable Mention

06honmen4

Title: The Troll

Description:
Polymer self assembly makes everyone smile.
(18nm half-pitch line/space pattern formed from lamellar phase diblock copolymer).

Magnification (3″x4″ image): 50kX
Instrument (Make and Model):  Leo 1560
Submitted by: Charles Black
Affiliation: IBM Research


Honorable Mention

06honmen5

Title: Vertigo

Description: Nanostructures fabricated in a (110)-oriented silicon sample by EBL and anisotropic wet etching in TMAH.

Magnification:  6.430X
Instrument (Make and Model): SEM LEO 1530
Submitted by: Irene Fernández-Cuesta
Affiliation: CNM – Barcelona


Honorable Mention

06honmen6

Title: OH NO! Mr. Bill!

Description: Voids in steel fracture at 3keV

Magnification (3″x4″ image): 4kX
Instrument (Make and Model):  Hitachi S-4800
Submitted by: Mike Hernandez
Affiliation: Hitachi High Technologies America


Honorable Mention

06honmen7

Title: Menage a Trois

Description:
PDMS elastomer pillars cast from a Silicon master bend and touch.


Magnification
: ~7 000X
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: Princeton University


Honorable Mention

06honmen8

Title: Bottom Feeder

Description:
There is plenty of room at the bottom for this new life form discovered on Planet Silicon.

Magnification: 33 000X
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: Princeton University


Honorable Mention

06honmen9

Title: I am your Father…

Description:
The dark side of the force corrupts a lift-off process, extruding polymer out from under a layer of chrome.

Magnification: 425 000X
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: Princeton University