Technology

In 2000, Zyvex Corporation received a significant research award from the National Institute of Standards and Technology's Advanced Technology Program (NIST ATP). Titled Assemblers for Nanotechnology Applications and Manufacturing: Enabling the Nanotechnology Era, with program ID 70NANB1H3021, this five year, cost-shared joint program with Honeywell and several universities supported the work shown below. We thank the NIST ATP for making this work possible.

In 2003 and 2004, Zyvex Corporation also received SBIR awards from DARPA to develop the mini-SEM shown here. Titled Miniaturized Scanning Electron Microscope (program ID DAAH01-03-C-R217) and Manufacturing Assembly Technology for Producing Low-cost Mini SEMs (program ID W31P4Q-04-C-R289), these programs supported our development of the electron optics portion of the work shown here.

In 2004, Zyvex Corporation received an SBIR from the Department of Energy titled MEMS Nanoprobe for Transmission Electron Microscope, program ID DE-FG 0204ER84130 which worked on the development of a MEMS-based nanomanipulator for TEMs. Results from this program are not shown here, but indirectly led to improvements in our MEMS fine positioning stages.

Our work can be categorized into four areas; each has a page devoted to it:

• Microassembly: building a variety of mechanical MEMS structures via 3D assembly
• Electron optics: focusing and deflecting electron beams using assembled MEMS lens elements
• Ion optics: focusing and deflecting ion beams, typically for mass spectrometer applications
• Photon optics: MEMS-based spectrometers and MEMS-based fiber alignment