Our vision is to synthesize, construct, and commercialize
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Assembled MEMS Photon Optical Bench

Features
Zyvex Labs has developed advanced assembly procedures using MEMS components under the NIST-ATP program. Our patented assembled MEMS technology provides a unique photon optical bench platform. We can combine MEMS actuators on a chip with other photon optic components (lenses, TFF, beam splitters, mirrors, and gratings, etc.) along with optical fibers. Our automated assembly procedure allows for heterogeneous assembly at submicron alignment. The assembled systems do not use epoxy, but isntead use mechanical flexures for alignment and lock-in-place. Also, an electrostatic and thermal actuator can be used as a driver to assemble photon optics components that are movable with high placement accuracy.

We have developed multiple photon optics active and passive devices, such as VOAs, optical switches, filters, aligners, optical spectrometer (play movie) and others. We provide a very modular platform that can suit your application. Our MEMS chip can be customized for your specific application. Our technology enables real 3D structures and is very manufacturable. Zyvex photon optical bench technology is the answer to the ever shrinking device sizes and the demand for improved performance.

A micro spectrometer chip with fiber, ball lens, rotating mirror, angled mirror, and other assembled components.

Applications

• Optical benches
• VOAs
• Optical cross connect and switches
• Micro optical spectrometer
• Miniature interferometers
• Optical fiber aligners

About the NIST ATP Award
Assemblers for Nanotechnology Applications and Manufacturing: Enabling the Nanotechnology Era.” The NIST-ATP awarded this $25 million program to Zyvex Corporation in 2001 for the explicit purpose of developing systems that provide highly-parallel microassembly and nanoassembly for real-world, high-volume applications. The program ended in December 2006, but the effects are seen through ongoing developments in our commercial products. The Advanced Technology Program (ATP) bridges the gap between the research lab and the marketplace, stimulating prosperity through innovation.