Zyvex Labs: The Innovation of Precision™

Our vision is to synthesize, construct, and commercialize
the world’s most precise manufactured products.

Photo: Zyvex Labs MicroMotor with 100 micron diameter through hole

Products

electron optics

:: mini mass spec
:: optical bench

mems actuators

:: microgrippers

micro motors

:: micro motor

photon optics

:: fiber aligner
:: optical bench

Zyvex Labs MicroMotor™ | A new generation of motor systems

The Zyvex Labs MicroMotor™ utilizes micromachining and microassembly technology to introduce a new generation of motor systems.

Thanks to our years of research in micro assembly and MicroElectroMechanical Systems (MEMS), you can now use the MicroMotor for micro and nanoscale research, development and production applications and integration into micro robotics and micro manipulation systems. Whether you are looking to reduce size or explore a new design space for your products, the MicroMotor system provides a unique solution.

SEM image of the Zyvex Labs MicroMotor™ showing electrode pads and access hole for 100um diameter shaft.

With physical dimensions comparable to a grain of rice, these motors provide remarkable performance with high precision, bi-directional, 360-degree rotation in a one cubic millimeter device.

Packaged Zyvex Labs MicroMotor™ with wire bonds.
(Play movie)

MicroElectroMechanical Systems (MEMS) fabrication technology enables the entire MicroMotor to be constructed from single crystal silicon. This high-strength material is combined with exceptionally smooth micromachining features to offer a motor that is robust and reliable.

Probe end effector installed in a Zyvex Instruments’
S100 Nanomanipulator.

MEMS-based electrothermal transducers drive the rotor through friction contacts and, by design, the rotor remains locked by the friction contacts when the transducers are not energized. In addition, the Zyvex Labs MicroMotor can provide motion contol and be programmed to take rotational step sizes less than one degree when combined with the Zyvex tDriver™ waveform generator or customer-provided drivers. The driving signals and device design have been optimized to provide the most efficient means of rotation.

Zyvex Labs MicroMotor™ with 100 micron diameter through hole.

Small size and planar form factor make integration onto PCB and SMT packages easy — our applications team will help with your packaging needs.

Our standard MicroMotors are designed to hold a 100 um diameter shaft. Other configurations are also available. Please contact us for custom configurations and packaging specific to your application

The units are sold in die form, or packaged as a Zyvex Labs MicroMotor probe end effector.

Specifications

Dimensions	1.2 mm x 1.2 mm x 0.7 mm (1 mm³)
Weight	0.01 grams
No Load Speed	0 to 6 rpm
No Load Step Size	0.8 degrees
Driving Torque	0.1 µNm
Static Torque (power off)	1 µNm
System Operating Voltage	24 Volts optimal
Average Power (6 rpm)	76 mW
Zero power when locked

Applications

• Rotating mirrors, prisms, optical rods and gratings.
   — Micro optical systems.
   — Mini camera systems and endoscopes.
• Micro and nano manipulation.
   — In-situ SEM and TEM sample rotation.
   — Part manipulation in micro assembly systems.
• Metrology and failure analysis.
   — Rotate probes and end effectors for semiconductor analysis.

Patents

U.S. Patent #6,877,316

Information

For more information about the Zyvex Labs MicroMotor™, please email us (at info @ zyvexlabs.com) or contact us by phone at 972.792.1620.