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Microcolumn-Assembled MEMS Electron Optical Bench

Features
Zyvex Labs’ patented miniature electron optical bench platform for electron and ion optic applications enables miniaturization of novel modules like a microcolumn on a single chip. Just like the silicon optical bench for photon optics, we provide a miniature electron/ion optical bench. Electrodes, including apertures, lens elements, qudrupole, and octupole components, can be integrated in a serial fashion to realize novel electron optic designs at very small scales (~ a few mm) like a microcolumn.

Assembled MEMS low voltage microcolumn (1.5KV)

Most standard components in the microcolumn are realized in a single MEMS process. Zyvex Labs’ patented assembly technology provides for <1um (or better) linear and <0.10 degree (or better) angular alignment. Our technology provides real 3D device structures so that you are no longer limited by the 2D monolithic nature of MEMS.

Our technology allows for high voltage standoff between electrodes (for example, 1.5KV for 100um spacing). Our microcolumn technology can be used to make custom miniature electron optic assemblies which require a small size and higher performance. The column components can be arrayed for advanced applications on a single chip.

Einzel lens		Octupole deflector

Applications

• Portable/miniature SEMs
• Wafer inspection tool
• Optical microscope replacement
• Add-on imaging tool in existing SEMs
• Proximity imager for AFMs
• Ebeam lithography
• Parallel ebeam lithography with microcolumn array
• Individual optic elements like Einzel lens and deflectors(Octupole/quadrupole)