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Mini Mass Spectrometer – Assembled MEMS Miniaturized Mass Spectrometer

Features
Zyvex Labs’ patented MEMS-based miniature Ion Trap Mass Spectrometer uses our microassembly platform and incorporates portability and performance in a very small module. With a mass range of 10 to 300 amu, the system can be used for chemical and biological compound detection. The overall system (including pumps, gauge, trap, detector, EI source, and other modules) fits in a volume of less than a cubic foot and weighs less than 20 lbs.

The 1mm ion trap can be arrayed on chip to increase throughput and sensitivity while reducing losses. It also enables use of low voltage RF that helps in reducing power consumption while maintaining the higher performance of bigger traps. The miniature mass spectromer uses a MEMS Pirani gauge that can be integrated into the ion trap chip for added functionality and further miniaturization. The mass spectrometer can also be integrated with a gas chromatograph on the front end.

Zyvex Labs’ modular microassembly can be used to make a host of ion optic equipment, including novel time-of-flight (TOF) reflectron (patent pending),

Assembled MEMS ion trap chip.

Assembled MEMS reflectron chip		Ion trap mass spectrometer

Applications

• Portable chemical detection system for hostile environments
• Biological and chemical compound detection for army
• Inspection tool at airport security checks
• Air monitoring of buildings
• First responder for fire department