1997 EIPBN Bizarre and Beautiful MicroGraph Contest

Honorable Mention


Title: "The Horns of a Dilemna - A Fakir's Delight"

Description: An array of sub-10nm radius silicon field emission tips made by a novel high resolution electron beam lithography and plasma dry etch.

Magnification (for 4" image height): 10,000X

Instrument: Hitachi S4000 FE Scanning Electron Microscope

Submitted by: Ezaz Hug and Ron Lawes, Rutherford Appleton Laboratory, ENGLAND

Honorable Mention


Title: Shortly Before Sunrise in Photonics County

Description: Materials deposited with e-beam to construct photonic band gap materials and photonic crystals.

Magnification (for 4" image height):

Instrument: JEOL 860F Scanning Electron Microscope

Submitted by: Hans Koops Deutch Telecom AG Darmstadt Germany

Honorable Mention


Title: Broken Sticks

Description: A double angled exposure of a mask grown directly on PMMA was plated up with nickel. I call these guys "Bridges" or "Forks".

Magnification (for 4" image height): 3000X

Instrument: Hitachi SEM

Submitted by: Victor White, University of Wisconsin, Madison

Honorable Mention


Title: Storm in Micropacific: Silicon Waves

Description: Phase-shifting Fresnel zone plate etched in mono-crystal silicon.

Magnification (for 4" image height): 11400X

Instrument: BS-300 Tesla, Scanning Electron Microscope.

Submitted by: Sergey Babin, Etec Systems Inc.

Honorable Mention


Title: Shark Attack

Description: A deep milled Si AFM probe tip, 2000A wide by 10um deep.

Magnification (for 4" image height): 6500X

Instrument: FEI DP 620

Submitted by: G. David Via, USAF Wright Laboratory

Honorable Mention


Title: Pillar Bridges

Description: Supporting Polysilicon layer for tungsten wiring on an image sensor device.

Magnification (for 4" image height):

Instrument: Philips XL-40 FEG Scanning Electron Microscope

Submitted by: Martin Verheijen and Frans Holthuysen, Philips Research Eindhoven

Honorable Mention


Title: Jerusalem of Gold

Description: Nano sculpture of PdAu on GaAs written by e-beam lithogrphy, using a JBX-5FE JEOL.

Magnification (for 4" image height):

Instrument: Topometrix TMX 2010 AFM

Submitted by: Dr. Diana Mahalu and Dr. Sidney Cohen, Weizmann Institue of Science, Rehovot, Israel

Honorable Mention


Title: Amber fields of GaN

Description: Gallium nitride nanostructures fabricated by photoelectrochemical etching.

Magnification (for 4" image height): 15,000X

Instrument: Cambridge 5360 Scanning Electron Microscope

Submitted by: Ilesamni Adesida and Chris Youtsey, University of Illinois

Honorable Mention


Title: Mystery of the Missing Mushroom

Description: In the process of etching an array of inverted pyramids in silicon, aggitation was found to be necessary. An anisotropic KOH solution was used which has a gaseous etch product. This gas comes off the silicon in bubbles which can protect the silicon from further etching unless the sample is aggitated and the bubbles come off the silicon surface.

Magnification (for 4" image height): 100,000X

Instrument: LEO 982 Scanning Electorn Microscope

Submitted by: Andrea Franke, MIT

Honorable Mention


Title: How we get those skinny lines to stand up.

Description: Joe Langston and co-worker found that personal intervention was the only solution to the collapse of high aspect ratio resist structures.

Magnification (for 4" image height):

Instrument: Scanning Electron Microscope

Submitted by: John Bjorkholm and Joe Langston INTEL

NOTE: This micrograph is clearly in violation of the rules (multiple images) and was not eligible for an official award. However, the judges loved it and it was awarded this honorlable mention.

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