The 51st International Conference on
Electron, Ion and Photon Beam Technology

Nanofabrication
Bizarre/Beautiful
Micrograph Contest

“A good Micrograph is worth more than the MegaByte it consumes.”

Entries Presented by Dr. John Randall

Sponsored by

     

 

 

The rules include the following:
• Entries have to be of a single image taken with a microscope and could not be significantly altered.
• There is no restriction with respect to the subject matter.
• Electron and ion micrographs have to be black and white.

In 2007, 110 entries were submitted. There were many outstanding micrographs. The work represented in the submitted micrographs covered a wide range of fields including micro mechanical, photonic, and integrated circuit fabrication, chemical and dry etching,  laser optics, carbon nanotube structures,  carbon nanotube growth experiments,  biological samples, material science experiments and, of course, e-beam, ion beam, x-ray, and photo lithography experiments.

The panel of judges who selected the award winners were:
• Lars Montelius
• Junichi Fujita
• Don Tennant

There were six awards:
Grand Prize

Best Electron Micrograph
Best Ion Micrograph
Best Photon Micrograph
Best Video
Most Bizarre Micrograph

There were six Honorable Mentions.

Judges exercised their prerogative to liberally interpret the award categories and change the micrograph titles.


GRAND PRIZE

Title: What's Being Smoked?

Description:
A silicon wafer is etched in KOH, with the assistance of a laser. The beam locally heats the silicon, increasing the etch rate greatly. The “fireworks” are small pieces of silicon breaking free and dissolving in the KOH solution. Dark-field illumination brings out the edge features.

Magnification
:   (3"x4" image): 2,000X
Instrument:  Custom 
Submitted by: Daniel Witte
Affiliation: Stanford University


BEST ELECTRON MICROGRAPH

Title: Gaudi’s Sagrada Familia - media: dirt

Description:
Polymeric structure, after “trying” to clean the sample.

Magnification
:   (3"x4" image): 1.600 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


BEST ION MICROGRAPH

Title: Maggot Feast

Description:
ALIS He+ Image: White blood cell.

Magnification
:   (3"x4" image): 20,000X
Instrument:  ALIS 1 
Submitted by: Nick Economou
Affiliation: Carl Zeiss SMT


BEST PHOTON MICROGRAPH

Title: Obsidian

Description:
Bubbles in thick, stretched photoresist.

Magnification
:   (3"x4" image): 8x
Instrument: Nikon SMZ 1500
Submitted by: Keith Morton
Affiliation: Princeton University


BEST VIDEO

Title: Micro Geyser

Description:
Fluorescent beads trapped in a drying droplet on a structured silicon surface.

Magnification
:   (3"x4" image): 10x
Instrument: Nikon TE 300  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


MOST BIZARRE MICROGRAPH

Title: Running Man

Description:
Nanojogger sprints along 200nm pitch gratings after a contaminated high temperature anneal.

Magnification
:   (3"x4" image): 91kx
Instrument: LEO 1550 SEM 
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


HONORABLE MENTION #1

Title: Cosmic Flatulation

Description:
E-beam alignment at the edge of a wafer (optical micrograph).

Magnification
: 500X
Instrument:  Leica DMRM
Submitted by: Sergey Babin
Affiliation: Abeam Technologies, Inc.


HONORABLE MENTION #2

Title: This is your brain on Jarlsberg

Description:
Self Assembled patterns (LISA) formed in resist during Nanoimprint transferred into silicon substrated by DRIE.

Magnification
:   (3"x4" image): 10,500x
Instrument: LEO 1550 SEM
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


HONORABLE MENTION #3

Title: Failure to Ignite

Description:
Replication of Surface Structures with Polydimethylsiloxane.

Magnification
: 5,000X
Instrument: FEI NovaNanoSEM600    
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


HONORABLE MENTION #4

Title: Where's the Fruit?

Description:
GST patterns after sputtering and lift-off.

Magnification
:   (3"x4" image): 50,000 x
Instrument: Hitachi S-4300
Submitted by: Sung Hoon Hong
Affiliation: Nano Materials & Devices Lab, Korea University


HONORABLE MENTION #5

Title: Tripe Close Up

Description:
200nm pitch gratings in imprint resist curl up near a scribe mark.

Magnification
:   (3"x4" image): 150,000x
Instrument: LEO 1550 SEM  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


HONORABLE MENTION #6

Title: Marching Low Brass

Description:
IPA film expanding on the top of Si wafer: formation of spectacular octopi-like dynamic group structures.

Magnification
:   (3"x4" image):
Instrument:  Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


ENTRIES

Title: Caves (Stalagnieten)

Description:
Heated of Silicum.

Magnification
: 4,000X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: Donut

Description:
The picture shows a feature on a micro-molded part from a deep-etched silicon mold. The replication is incomplete due to premature itrification of the thermoplastic polymer.

Magnification
: 1,250X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: Cell Division of an Embryo

Description:
The SEM photograph shows a detail of a quartz plate that was locally isotropically etched with hydrogen fluoride solution.  

Magnification
: 1,250X
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: Leaves

Description:
A metal film was structured by plasma etching.

Magnification
: 100.000 x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: Skyline of Hong Kong

Description:
Micro-masking during dry-etch process.

Magnification
: 80.000x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: Wave

Description:
Bad adhesion of metallization.

Magnification
: 40.000 x
Instrument: FEI NovaNanoSEM600
Submitted by: Frans Holthuysen
Affiliation: Philips Research Labs, Eindhoven, the Netherlands


Title: CNT+CdTe=PV

Description:
Single carbon nanotube coated via MBE with CdTe for photovoltaic device.

Magnification
: scale bar
Instrument:  LEO 1550
Submitted by: Jud Ready
Affiliation: Georgia Tech


Title: Nano Clown

Description:
A by-product of duplication of nano-rings by nanoimprint lithography.

Magnification
: 279.9KX
Instrument: LEO 1550
Submitted by: Can Peng
Affiliation: Nanostructure Lab, Princeton University


Title: Dragonfly Among the Reeds

Description:
The nanodragonfly plays among the nanoreeds in the nanoswamp.

Magnification
: 698
Instrument: Zeiss 1560
Submitted by: Nina Ruiz
Affiliation: IBM T.J. Watson Research Ctr


Title: Air-Bridge #1 Electrical Nano-Interconnects to Photonic Crystal Microcavity Arrays

Description:
Electrical contacts are made via nano-contacts to sub-micron pedestal mounted 2D photonic crystal membrane microcavities in III-V quantum dot heterostuctures. Air bridges are fabricated by single step e-beam lithography to achieve high carrier injection efficiency to the microcavity and avoid non-radiative recombination losses.

Magnification
: 16.46KX
Instrument: Raith 150 + Leo SEM
Submitted by: Swapnajit Chakravarty
Affiliation: University of Michigan, Ann Arbor


Title: Air-Bridge #2 Electrical Nano-Interconnects to Photonic Crystal Microcavity Arrays

Description:
Electrical contacts are made via nano-contacts to sub-micron pedestal mounted 2D photonic crystal membrane microcavities in III-V quantum dot heterostuctures. Air bridges are fabricated by single step e-beam lithography to achieve high carrier injection efficiency to the microcavity and avoid non-radiative recombination losses.

Magnification
: 5.96 KX
Instrument: Raith 150 + Leo SEM
Submitted by: Swapnajit Chakravarty
Affiliation: University of Michigan, Ann Arbor


Title: Nano-Electrical Bridges Interconnect Photonic Crystal Nanocavity Arrays

Description:
Electrical contacts are made via nano-contacts to sub-micron pedestal mounted 2D photonic crystal membrane microcavities in III-V quantum dot heterostuctures. Air bridges are fabricated by single step e-beam lithography to achieve carrier injection into nanocavities surrounded by etched air holes and avoid non-radiative losses.

Magnification
: 25.74 KX
Instrument: Raith 150 + Leo
Submitted by: Swapnajit Chakravarty
Affiliation: University of Michigan, Ann Arbor


Title: Trojan Horse in the Micro-World

Description:
Nanoscale clusters appear to be a Trojan horse unexpectedly.

Magnification
:  3880 X
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Emergency Train Stop

Description:
Copper film delaminated during cleaving of samples for cross sectional SEM.

Magnification
:  4940 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Micro Limestone Caves

Description:
A nanoscale copper cluster deposition in trenches emulates the formation of stalactites in limestone caves.

Magnification
:  32 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Copper Leaf Trees

Description:
Nanoscale copper particles stick to the side walls and transform to leaves.

Magnification
:  20 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Christmas Trees and Oak Trees

Description:
Nanoscale copper particles stick to the side walls and appear like oak trees holding hands to protect the Christmas trees underneath.

Magnification
:  15 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Desert Vision

Description:
When the cleaved surface of Si wafer was damaged, unexpected vision appeared.

Magnification
:  2000 x 
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Dolphins Sun Bathing

Description:
After annealing in high temperature, copper nanoscale clusters agglomerate and transform into rows of nanoscale dolphins.

Magnification
:   70 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Roller Coaster

Description:
Low-k dielectric material deformed under electron radiation making the trenches bend over.

Magnification
:   4370 x  
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Fireworks

Description:
After surviving the cold winter at liquid nitrogen temperature, the nanoscale clusters peel off and transform into fireworks to celebrate New Year.

Magnification
:  10 000 x
Instrument: Raith 150
Submitted by: K.C. Tee and K. Mohamed
Affiliation: University of Canterbury


Title: Cadillac Mountain

Description:
You do not have to wait in the early morning at Acadia National Park for this spectacular scene--- just look into your RIE chamber…

Magnification
:   (3"x4" image): ~1.5x
Instrument: SONY W5 digital camera
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Title: Rudolph the Nano-Sized Reindeer

Description:
Rudolph is leaping among the snowflakes to save Christmas for a whole new nano world.

Magnification
:   (3"x4" image): 196,830X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Title: “Luray Caverns” by a New Paradigm

Description:
120 years per cubic inch for stalactite growth? It’s like doing EBL. Why not use NIL as shown here?

Magnification
:   (3"x4" image): 100,000X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Title: “Luray Caverns” by a New Paradigm

Description:
When the Disney Company requested some design ideas for a new park in Princeton, a group of Mr. Small (a.k.a., nanos) in town took advantage of their deep silicon etcher and excimer laser…

Magnification
:   (3"x4" image): 50,000X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Title: New Jersey, Imprinted!

Description:
At Princeton, even a failed imprint is made of New Jersey, in New Jersey and for New Jersey.

Magnification
:   (3"x4" image): 1,100X
Instrument: LEO 1550 SEM
Submitted by: Qiangfei Xia
Affiliation: Princeton University


Title: Sharks Everywhere!

Description:
Silicon sharks circle around an HPR victim in a Flowable Oxide sea.

Magnification
:   (3"x4" image): 60,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Nano Dwarf

Description:
Nano dwarf Oblio strolls the HSQ/Silicon surface, looking for his dog Arrow.

Magnification
:   (3"x4" image): 150,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Alien

Description:
During a starry night at full moon, an Alien larva awakes right on top of my HSQ/HPR line pattern!

Magnification
:   (3"x4" image): 25,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Black Hole

Description:
Silicon debris is circulating towards the microns-wide center of the maelstrom.

Magnification
:   (3"x4" image): 5,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Cat Face

Description:
After developing an HSQ pattern, this wet cat gazes at me as if I should have used another developer.

Magnification
:   (3"x4" image): 5,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Egyptian Eye

Description:
Egyptian mythology meets Nanotechnology through the Eye of Horus.

Magnification
:   (3"x4" image): 280X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: EIPBN Conference 2007

Description:
Beyond the Rocky Mountains, nano-technologists from all over the world gather in Denver, Colorado.

Magnification
:   (3"x4" image): 24,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Have an Ice Cream

Description:
Special offer: HSQ/HPR/Silicon flavored ice cream!

Magnification
:   (3"x4" image): 600X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Let it Snow!

Description:
This happens in HSQ lithography when skipping the stop bath!

Magnification
:   (3"x4" image): 10,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: MicroGRAPHiti

Description:
This would be a winner when SEM micrographs will be in color…

Magnification
:   (3"x4" image): 400X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Let's Build A Nanoworld

Description:
Giant Silicon building blocks on top of arrays of sub-10nm HSQ line patterns.

Magnification
:   (3"x4" image): 16,000X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Waves

Description:
Seismic waves propagate outside a meteor crater in the Silicon surface.

Magnification
:   (3"x4" image): 1,200X
Instrument: FEI NovaNanoSEM200
Submitted by: Anda Grigorescu & Marco van der Krogt
Affiliation: Delft University of Technology, The Netherlands


Title: Dali’s Smallest Canvas – Micro Elephant’s Back

Description:
This image resulted from testing of a micro-mirror array based stereo-lithography tool. The original artwork image was fed to the mirror control software which translated the original colors into an exposure time and the image was captured on a photoresist thin film. The colors now seen in the image are the result of different thin film interference colors due to the variations in resist film thickness after film development.

Magnification
:   (3"x4" image): 10X
Instrument: Olympus Vanox
Submitted by: Cliff Henderson
Affiliation: Georgia Tech


Title: Micro Van Gogh - A Very Small Starry Night

Description:
This image resulted from testing of a micro-mirror array based stereo-lithography tool. The original artwork image was fed to the mirror control software which translated the original colors into an exposure time and the image was captured on a photoresist thin film. The colors now seen in the image are the result of different thin film interference colors due to the variations in resist film thickness after film development.

Magnification
:   (3"x4" image): 10X
Instrument: Olympus Vanox
Submitted by: Cliff Henderson
Affiliation: Georgia Tech


Title: Micro Radio Telescope Array

Description:
If SEM is scanning over this telescope array, it will perceive you and begin to scan you one after another.

Magnification
:   (3"x4" image): 1500x
Instrument: HITACHI S-3000H
Submitted by: Harutaka Mekaru
Affiliation: AIST, Japan


Title: Kiss Under the Sea

Description:
A little mermaid and a dolphin kiss each other under the sea.

Magnification
:   (3"x4" image): 503x
Instrument:   FEI XL-30 ESEM Submitted by: Jaebum Joo
Affiliation: MIT


Title: Hazardous

Description:
Bubble in a tri-layer resist stack.

Magnification
:   (3"x4" image): 200x
Instrument: Nikon, Optical
Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada


Title: On the Nano-Green

Description:
InP whisker.

Magnification
:   (3"x4" image): 130kx
Instrument: Hitachi S-4700 Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada


Title: Nano-Trees

Description:
InP whisker.

Magnification
:   (3"x4" image): 15kx
Instrument: Nikon, Optical
Submitted by: Jean Lapointe
Affiliation: National Research Council, Canada


Title: Nano-Muffins

Description:
Over grows by electo-plating and nanoimprint lithography.

Magnification
:   (3"x4" image): 30,000x
Instrument: Hitachi S-4300
Submitted by: Jong Woo Kim
Affiliation: Nano Materials & Devices Lab, Korea University.


Title: Gizah Mikado

Description:
A DUV resist was exposed with E-Beam at 50kV. In vacuum, the photo active compound of the resist is volatile and characteristic inverted pyramids are being formed.

Magnification
:   (3"x4" image): 20kx
Instrument: Hitachi RS4000 SEM
Submitted by: Katja Keil
Affiliation: Fraunhofer CNT, Dresden, Germany


Title: Room With A View

Description:
There’s plenty of room at this castle sculpted from silicon during deep reactive ion etching.

Magnification
:   (3"x4" image): 110,000x
Instrument: LEO 1550 SEM  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: Nano Kisses

Description:
Nanoimprinted Kisses arrayed on a platter.

Magnification
:   (3"x4" image): 400,000x
Instrument: LEO 1550 SEM 
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: Branched

Description:
Lone, bifurcated silicon nanopillar after deep silicon etch.

Magnification
:   (3"x4" image): 60,000x
Instrument: LEO 1550 SEM  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: Bubbly

Description:
Water condenses on the inside of air pocket in PDMS after curing (white light with red filter).

Magnification
:   (3"x4" image): 11x
Instrument: Nikon SMZ 1500  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: A Baseball Bat for the Nano Leagues

Description:
Tapered silicon pillar by Deep Reactive Ion Etching.

Magnification
:   (3"x4" image): 10,800x
Instrument: Philips XL30 SEM 
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: Pitcher Plants

Description:
Hollowed out silicon pillars after deep reactive ion etching.

Magnification
:   (3"x4" image): 22,820x
Instrument: Philips XL30 SEM  
Submitted by: Keith Morton
Affiliation: NSL, Princeton University


Title: I'm Watching You!

Description:
Creepy crawly vistor to the lab

Magnification
:   (3"x4" image): 10x
Instrument: Nikon SMZ 1550
Submitted by: Keith Morton
Affiliation: Princeton University


Title: Waterfalls

Description:
Scenery of nitride waterfalls with bizarre silicon stones in MIT Nanostructure Laboratory.

Magnification
:   (3"x4" image): 10,000x
Instrument: Zeiss Leo 982 SEM    
Submitted by: Minseung Ahn
Affiliation: MIT


Title: Nano Giraffes

Description:
Ten micron tall giraffes are wandering in the silicon bush.

Magnification
:   (3"x4" image): 3,000x
Instrument: Zeiss Leo 982 SEM    
Submitted by: Minseung Ahn
Affiliation: MIT


Title: INSERT VIDEO FILE - Nano Conductor

Description:
This video obtained by SEM shows the nano conductor structure growth by FIB-CVD. This video is a x15 speed video. By using SEM observation, we carried out the in-situ observation of 3-D structure growth by FIB-CVD. The nano conductor is made of DLC and he has a taktstock of 100nm diameter in his left hand. By FIB-CVD, 3-D structure is grown up like this video.

Magnification
:   (3"x4" image): 17,000x
Instrument: SII NanoTechnology Inc. / SMI2050MS2    
Submitted by: Reo Kometani and Shinji Matsui
Affiliation: University of Hyogo


Title: Brush

Description:
Bad adhesion of HSQ (Hydrogen silsesquioxane) structures after development.

Magnification
:   (3"x4" image): 16,469x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Tree in the Morning

Description:
Iron whisker after EBID growth.

Magnification
:   (3"x4" image): 26,823x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Imprinted Tulips

Description:
Imprint into PMMA.

Magnification
:   (3"x4" image): 100x
Instrument: Leitz F5  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Zorro`s Nanotube Z

Description:
Carbon nanotubes along a scratch on a silicon oxide substrate.

Magnification
:   (3"x4" image): 596x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Dog

Description:
Silicon particle on a silicon substrate.

Magnification
:   (3"x4" image): 2,490x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Colorado Rockies

Description:
Side view of HSQ (Hydrogen Silsesquioxane) peaks.

Magnification
:   (3"x4" image): 16,469x
Instrument: 292,768x
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Dancer

Description:
Side view of a silicon particle on a silicon substrate.

Magnification
:   (3"x4" image): 65,169x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Fakir-Stone

Description:
Silicon particle on HSQ (Hydrogen Silsesquioxane) lines.

Magnification
:   (3"x4" image): 36596x
Instrument: Ph. XL30  
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Loose Ends

Description:
Resist mask for interdigitated electrodes, where the HMDS priming was forgotten.

Magnification
:   (3"x4" image): 1,500x
Instrument: Hitachi S4800
Submitted by: Bengt Nilsson
Affiliation: Chalmers University of Technology, Nanofabrication Laboratory University of Tuebingen


Title: Nano Seagull

Description:
While scanning the electron beach on a day made hot by the thermal emission source, this nano-seagull was observed staying cool in the signal-to-noise fog.
(organic residue on wafer after etch viewed in cross-section)

Magnification
:   (3"x4" image): 71,100x
Instrument: Hitachi S-3500N SEM
Submitted by: David J. Carter
Affiliation: The Charles Stark Draper Laboratory


Title: Nano Pterodactyl

Description:
Our SEM may not be the latest model, but it’s not that old…
(organic residue on wafer after etch viewed in cross-section)

Magnification
:   (3"x4" image): 13,333x
Instrument: Hitachi S-3500N SEM
Submitted by: David J. Carter
Affiliation: The Charles Stark Draper Laboratory


Title: Blue Flowers

Description:
Dots imprinted in PMMA. Dark field optical image.

Magnification
:   (3"x4" image): 50x
Instrument: Nikon, Optical Microscope ME600
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Seashore

Description:
Rubbish on Structures made in Gold on a polymer substrate.

Magnification
:   (3"x4" image): 7.940 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Under the Sea

Description:
Air bubbles in PMMA.

Magnification
:   (3"x4" image): 2.540 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Rhapsody in Blue

Description:
Matrix of Dots, imprinted in PMMA. Dark field optical image.

Magnification
:   (3"x4" image): 100 x
Instrument: Nikon, Optical Microscope ME600
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Spring

Description:
PMMA structures formed during NanoImprint

Magnification
:   (3"x4" image): 800 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Toothbrush

Description:
Aluminum pattern after a lift-off.

Magnification
:   (3"x4" image): 3.430 x
Instrument: SEM LEO 1530
Submitted by: Irene Fernandez-Cuesta
Affiliation: CNM - Barcelona


Title: Nano Sunflower

Description:
Electron-beam patterned HSQ needles form sunflower florets

Magnification
:   (3"x4" image): 15,000 x
Instrument: Zeiss 982
Submitted by: Joel Yang
Affiliation: MIT


Title: The Titanic Cruising Over Troubled Waters

Description:
100 nm (W) x 1 micron (H) nanowaveguide in U configuration fabricated in HSQ, used as an etch mask on 1 micron thick SU8.
Nanowaveguide fabricated with 100 KV JEOL 9300 electron beam lithography tool. Etch process had some gas mixture problems.

Magnification
:   (3"x4" image): 25,000 x
Instrument: FEI
Submitted by: L.E. Ocola
Affiliation: Argonne National Lab


Title: Emerging Frog

Description:
Resist at the edge of a silicon substrate.

Magnification
:   (3"x4" image): 100 x
Instrument: Leitz F5
Submitted by: Michael Häffner
Affiliation: University of Tuebingen


Title: Next Generation Tie Fighter

Description:
Titanium grown on silicon.

Magnification
:   (3"x4" image): 5,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory


Title: Battle Samurai Helmut (Kabuto)

Description:
Resist etched on silicon.

Magnification
:   (3"x4" image): 100,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory


Title: Fish Exercising Their First Amendment Right to Peaceably Assemble

Description:
Silicon nodules.

Magnification
:   (3"x4" image): 50,000 x
Instrument: Leo 982
Submitted by: T. Fedynyshyn & S. Cann
Affiliation: MIT Lincoln Laboratory


Title: Spaghetti

Description:
High volume manufacturing of sub-µm spaghettis.

Magnification
:   (3"x4" image): 5,540 x
Instrument: LEO, Supra35
Submitted by: Thomas Glinsner
Affiliation: EVGroup


Title: Long Stemmed Rose

Description:
A silicon nitride membrane was rolled up by high dose helium ion implantation.

Magnification
:   (3"x4" image): 3,500 x
Instrument: Zeiss DSM982 Gemini SEM
Submitted by: William Arora
Affiliation: MIT


Title: Stealth Fighter

Description:
A photoresist coat only stuck inside the areas that were etched into this silicon nitride membrane.

Magnification
:   (3"x4" image): 400 x
Instrument:  Leica Ergolux microscope
Submitted by: William Arora
Affiliation: MIT


Title: Electrospun DNA Lightning

Description:
Electrospinning of fluorescent DNA produces nanofibers. This one decided not to form a straight fiber over trenches…

Magnification
:   (3"x4" image):
Instrument:  Olympus BX-51
Submitted by: Leon Bellan
Affiliation: Cornell University


Title: Cu deposition art!!!

Description:
PVD Cu blanket film defectivity.

Magnification
:   (3"x4" image):
Instrument:  Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: DIW drying film curriculum vitae: frame formation

Description:
Once the film is saturated with dissolved material, its contraction freezes and the peripheral section swiftly detaches itself from the internal section, forming a frame.

Magnification
:   (3"x4" image):
Instrument:  Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Real time SEM: Convective motion in molten Cu film

Description:
Once the film is saturated with dissolved material, its contraction freezes, and the peripheral section swiftly detaches itself from the internal section, forming a frame.

Magnification
:   (3"x4" image):
Instrument:  Sony AL 100M opt. microscope
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #1: Just a watermark

Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).

Magnification
:   (3"x4" image):
Instrument:  Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #2: Through space

Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).

Magnification
:   (3"x4" image):
Instrument:  Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #3: Observer

Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).

Magnification
:   (3"x4" image):
Instrument:  Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #4: Space Lion

Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).

Magnification
:   (3"x4" image):
Instrument:   Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #5: No title

Description:
DIW-Si watermarks (residue left over the Si wafer surface after evaporation of de-ionized water droplets).

Magnification
:   (3"x4" image):
Instrument:   Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: Watermark Series #6: IPA mark actually

Description:
IPA-Si watermarks (residue left over the Si wafer surface after evaporation of IPA droplets).

Magnification
:   (3"x4" image):
Instrument:  Lab tool, undefined model
Submitted by: Yehiel Gotkis
Affiliation: Sr. Principal Eng., REBL Program, KLA-Tencor


Title: There’s plenty of room at the bottom...TO PARTYYY!

Description:
Electron-beam exposed HSQ nano-figurines on Si.

Magnification
:   (3"x4" image): 100,000X
Instrument:  Zeiss 982 
Submitted by: Joel Yang
Affiliation: MIT


Title: Diving Board for Jumping into Oblivion at the Edge of the Nano-Universe

Description:
Shard of Silicon Nitride (300nm thick) patterned with 300nm diameter holes hovers over a cleaved sample.

Magnification
:   (3"x4" image): 10,000X
Instrument:  Zeiss LEO SEM 
Submitted by: Amil Patel
Affiliation: MIT


Title: Broke

Description:
ALIS He+ Image: Carbon Nanotube Image.

Magnification
:   (3"x4" image): 50,000X
Instrument:  ALIS 1 
Submitted by: Nick Economou
Affiliation: Carl Zeiss SMT

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