The fields of research covered by this conference have been at the forefront
of the drive to develop technology to make smaller and smaller structures. We
have ventured into size regimes where we are often dependent on microscopes
and the skill of microscopists to see the results of our work (and often what
went wrong). To highlight the importance of micrographs to the field, the conference
holds a micrograph contest. The entries were judged both from the technological
and artistic standpoint. Six categories were defined:
In 2003, 25 entries were submitted. There were many outstanding micrographs. The work represented in the submitted micrographs covered a wide range of fields including micro mechanical, photonic, and integrated circuit fabrication, chemical and dry etching, laser optics, genetic experiments, carbon nanotube structures, carbon nanotube growth experimrnts, biological samples, material science experiments and, of course, e-beam, ion beam, x-ray, and photo lithography experiments.
The panel of judges who selected the award winners consisted of:
Prof. Franco Cerrina
University of Wisconsin
Dr. Shalomb Wind
Columbia University
Dr. Don Tennant
Bell Laboratories
TITLE: Attack of the Clones
Description: Nanoscale soldiers in marching formation on the edge of a silicon substrate
Magnification: 200,000 x
Instrument: LEO 1550 SEM
Submitted by: Zhaoning Yu, NSL: Princeton University
TITLE: Nano Trek
Description: Nano Space - The final frontier. The space ship Enterprise NCC-1701D of Star Trek was fabricated in one-billionth scale by 30 kV Ga+ focused-ion- beam CVD using phenanthrene gas. Length 8.8 µm.
Magnification (3"x4" image): 5,000X
Instrument: Seiko Instruments,Inc. SMI9200
Submitted by: Takayuki Hoshino & Shinji Matsui, Himeji Institute of Technology

TITLE: Arachnophobia
Description: Laser beam diffracted by a circular transmission grating creates interference fringes near the center of the circle. Multiple beams arriving at the same location cause the observed Moiré pattern.
Magnification (3"x4" image): 70x
Instrument: Nikon INM20
Submitted by: Harun H. Solak: Paul Scherrer Institute (Switzerland)
TITLE: “The Face”
Description: Streaming video micrograph of transient electrostatic mirror decomposition on a passivated VLSIC sample
Magnification: (3"x4" image): 216X
Instrument: Hitachi S-4100 FESEM
Submitted by: Wai-Kin Wong: Stanford University/National University of Singapore
TITLE: Dancing Girls
Description: Cupper damascene metal structure
Magnification: 50,000X
Instrument: Philips XL40FEG
Submitted by: Frans Holthuysen:Bas Ketelaars
TITLE: Iron Maiden
Description: Thermally actuated serpentine MEMS device for RF and other applications.
Magnification (3"x4" image): X400
Instrument: LEO
Submitted by: P. Foster, A. Geisberger, N. Sarkar: Zyvex Corporation